Thesis on SPAD Integration into 28nm SOI Process
INL - Institut des Nanotechnologies de Lyon, France, publishes a PhD Thesis "Integration of Single Photon Avalanche Diodes in Fully Depleted Silicon-on-Insulator Technology" by Tulio Chaves de Albuquerque. It starts with a nice introduction into generic SPAD technology and then goes into its integration into FDSOI process.
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