PRNewswire: Axcelis announces that it has shipped multiple Purion VXE (up to 5.3MeV) and Purion EXE (up to 8MeV) high energy systems to several leading CMOS image sensor manufacturers. The systems shipped in the third quarter. There is no word on adaption the highest energy Purion XEmax supportint up to 15MeV ion implantation.
EVP of Product Development, Bill Bintz, commented, "Axcelis has created a flexible, highly differentiated high energy product portfolio that is ideally suited to address the exact needs of customers manufacturing image sensors for applications requiring ultra-high energy implants with extremely precise and deep doping profiles."
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